Chemical-Mechanical Planarization of Semiconductor Materials
M.R. Oliver
Mrt. 2013 · Springer Series in Materials Science Boek 69 · Springer Science & Business Media
E-boek
428
Bladsye
reportGraderings en resensies word nie geverifieer nie. Kom meer te wete
Meer oor hierdie e-boek
Chemical Mechanical Planarization (CMP) has emerged in the last two decades and grown rapidly as a basic technology widely used in semiconduc tor device fabrication. As a semiconductor processing step, it was developed at IBM in the mid 1980s. From this beginning the technology has been widely adopted throughout the semiconductor industry. As basic CMP technology has been understood and accepted throughout the semiconductor industry, its uses in different parts of the semiconductor process have multiplied. This includes special steps for some special process ing flows, such as for DRAM technology. In addition, the availability of CMP technology has enabled the implementation of new technologies, with the best example being copper interconnect technology. Copper could not be practi cally implemented into semiconductor process flows until the advent of CMP. Unfortunately, the rapid acceptance and implementation of CMP technol ogy in wafer fabrication has occurred without a corresponding rate of advance in the underlying science. Progress is being made in understanding the un derlying CMP mechanisms, but, in general, it is slow and uneven. The most noteworthy exception to this trend is the science of metal CMP reactions, where the scientific understanding is actually driving much of the advance of the technology. There has been no corresponding progress in other CMP areas however.
Gradeer hierdie e-boek
Sê vir ons wat jy dink.
Lees inligting
Slimfone en tablette
Installeer die Google Play Boeke-app vir Android en iPad/iPhone. Dit sinkroniseer outomaties met jou rekening en maak dit vir jou moontlik om aanlyn of vanlyn te lees waar jy ook al is.
Skootrekenaars en rekenaars
Jy kan jou rekenaar se webblaaier gebruik om na oudioboeke wat jy op Google Play gekoop het, te luister.
E-lesers en ander toestelle
Om op e-inktoestelle soos Kobo-e-lesers te lees, moet jy ’n lêer aflaai en dit na jou toestel toe oordra. Volg die gedetailleerde hulpsentrumaanwysings om die lêers na ondersteunde e-lesers toe oor te dra.
