Deep Implants: Fundamentals and Applications

G.G. Bentini · A. Golanski · S. Kalbitzer

Jan 1989 · European Materials Research Society Symposia Proceedings Ibhuku elingu-3 · Elsevier

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Deep implants are produced by the high-energy implantation of impurities in a host material. The thus created subsurface layers have properties that are different from the very surface and the bulk and show great promise for application in the electronics industry.

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