Ion Implantation: Basics to Device Fabrication
Emanuele Rimini
stu 2013. · The Springer International Series in Engineering and Computer Science Knjiga 293 · Springer Science & Business Media
E-knjiga
393
str.
reportOcjene i recenzije nisu potvrđene Saznajte više
O ovoj e-knjizi
Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics. As the major or the unique procedure to selectively dope semiconductor materials for device fabrication, ion implantation takes advantage of the tremendous development of microelectronics and it evolves in a multidisciplinary frame. Physicists, chemists, materials sci entists, processing, device production, device design and ion beam engineers are all involved in this subject. The present monography deals with several aspects of ion implantation. The first chapter covers basic information on the physics of devices together with a brief description of the main trends in the field. The second chapter is devoted to ion im planters, including also high energy apparatus and a description of wafer charging and contaminants. Yield is a quite relevant is sue in the industrial surrounding and must be also discussed in the academic ambient. The slowing down of ions is treated in the third chapter both analytically and by numerical simulation meth ods. Channeling implants are described in some details in view of their relevance at the zero degree implants and of the available industrial parallel beam systems. Damage and its annealing are the key processes in ion implantation. Chapter four and five are dedicated to this extremely important subject.
Ocijenite ovu e-knjigu
Recite nam što mislite.
Informacije o čitanju
Pametni telefoni i tableti
Instalirajte aplikaciju Google Play knjige za Android i iPad/iPhone. Automatski se sinkronizira s vašim računom i omogućuje vam da čitate online ili offline gdje god bili.
Prijenosna i stolna računala
Audioknjige kupljene na Google Playu možete slušati pomoću web-preglednika na računalu.
Elektronički čitači i ostali uređaji
Za čitanje na uređajima s elektroničkom tintom, kao što su Kobo e-čitači, trebate preuzeti datoteku i prenijeti je na svoj uređaj. Slijedite detaljne upute u centru za pomoć za prijenos datoteka na podržane e-čitače.
