Ion Implantation: Basics to Device Fabrication
Emanuele Rimini
2013-11 · The Springer International Series in Engineering and Computer Science 293 knyga · Springer Science & Business Media
El. knyga
393
Puslapiai
reportĮvertinimai ir apžvalgos nepatvirtinti. Sužinokite daugiau
Apie šią el. knygą
Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics. As the major or the unique procedure to selectively dope semiconductor materials for device fabrication, ion implantation takes advantage of the tremendous development of microelectronics and it evolves in a multidisciplinary frame. Physicists, chemists, materials sci entists, processing, device production, device design and ion beam engineers are all involved in this subject. The present monography deals with several aspects of ion implantation. The first chapter covers basic information on the physics of devices together with a brief description of the main trends in the field. The second chapter is devoted to ion im planters, including also high energy apparatus and a description of wafer charging and contaminants. Yield is a quite relevant is sue in the industrial surrounding and must be also discussed in the academic ambient. The slowing down of ions is treated in the third chapter both analytically and by numerical simulation meth ods. Channeling implants are described in some details in view of their relevance at the zero degree implants and of the available industrial parallel beam systems. Damage and its annealing are the key processes in ion implantation. Chapter four and five are dedicated to this extremely important subject.
Įvertinti šią el. knygą
Pasidalykite savo nuomone.
Skaitymo informacija
Išmanieji telefonai ir planšetiniai kompiuteriai
Įdiekite „Google Play“ knygų programą, skirtą „Android“ ir „iPad“ / „iPhone“. Ji automatiškai susinchronizuojama su paskyra ir jūs galite skaityti tiek prisijungę, tiek neprisijungę, kad ir kur būtumėte.
Nešiojamieji ir staliniai kompiuteriai
Galite klausyti garsinių knygų, įsigytų sistemoje „Google Play“ naudojant kompiuterio žiniatinklio naršyklę.
El. knygų skaitytuvai ir kiti įrenginiai
Jei norite skaityti el. skaitytuvuose, pvz., „Kobo eReader“, turite atsisiųsti failą ir perkelti jį į įrenginį. Kad perkeltumėte failus į palaikomus el. skaitytuvus, vadovaukitės išsamiomis pagalbos centro instrukcijomis.
