Precision Motion Control (second edition) focuses on enabling technologies for precision engineering - issues of direct importance to be addressed in the overall system design and realization: precision instrumentation and measurement, geometrical calibration and compensation, and motion control. It is a compilation of the most important results and publications from a major project that develops a state-of-the-art, high-speed, ultra-precision robotic system.
The second edition has been extensively edited and rewritten throughout with the following particular areas being expanded or added:
• piezoelectric actuators;
• fine movement control;
• gantry-stage control;
• interpolation of quadrature encoder signals;
• geometrical error modelling for single-, dual- and general-XY-axis stages.
By providing detailed experimental verifications of the material developed, a comprehensive and thorough treatment of the subject matter is provided in a manner that is accessible to a broad base of readers, ranging from academics to practitioners.