Scanning Electron Microscopy: Physics of Image Formation and Microanalysis, Edition 2
Nov 2013 · Springer Series in Optical Sciences Book 45 · Springer
Ebook
529
Pages
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About this ebook
Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.
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