Plasma Processing of Semiconductors
P.F. Williams
ኖቬም 2013 · NATO Science Series E መጽሐፍ 336 · Springer Science & Business Media
ኢ-መጽሐፍ
613
ገጾች
reportየተሰጡት ደረጃዎች እና ግምገማዎች የተረጋገጡ አይደሉም የበለጠ ለመረዳት
ስለዚህ ኢ-መጽሐፍ
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
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ኢሪደሮች እና ሌሎች መሳሪያዎች
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