Spectroscopic Ellipsometry: Principles and Applications
Hiroyuki Fujiwara
Set 2007 · John Wiley & Sons
5.0star
1 reviewreport
E-book
392
Mga Page
reportHindi na-verify ang mga rating at review Matuto Pa
Tungkol sa ebook na ito
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
Mga rating at review
5.0
1 review
Tungkol sa may-akda
Dr Hiroyuki Fujiwara is based at the National Institute of Advanced Industrial Science and Technology, Ibaraki, Japan. He received his PhD at the Tokyo Institute of Technology in 1996 and carried out post-doctoral research with Professor R.W. Collins at Penn State University. From 1998 to present he has been working as a senior research scientist at the Research Center for Photovoltaics at NIAIST. He received the 'Most Promising Young Scientist Award' from the Japan Society of Applied Physics and the 'Young Researcher Award' at the World Conference on Photovoltaic Energy Conversion in 2003.
I-rate ang e-book na ito
Ipalaam sa amin ang iyong opinyon.
Impormasyon sa pagbabasa
Mga smartphone at tablet
I-install ang Google Play Books app para sa Android at iPad/iPhone. Awtomatiko itong nagsi-sync sa account mo at nagbibigay-daan sa iyong magbasa online o offline nasaan ka man.
Mga laptop at computer
Maaari kang makinig sa mga audiobook na binili sa Google Play gamit ang web browser ng iyong computer.
Mga eReader at iba pang mga device
Para magbasa tungkol sa mga e-ink device gaya ng mga Kobo eReader, kakailanganin mong mag-download ng file at ilipat ito sa iyong device. Sundin ang mga detalyadong tagubilin sa Help Center para mailipat ang mga file sa mga sinusuportahang eReader.
