Thin Films On Silicon: Electronic And Photonic Applications
Vijay Narayanan · Martin M Frank · Alexander A Demkov
Aug 2016 · Materials And Energy Book 8 · World Scientific
Ebook
552
Pages
family_home
Eligible
info
reportRatings and reviews aren’t verified Learn More
About this ebook
This volume provides a broad overview of the fundamental materials science of thin films that use silicon as an active substrate or passive template, with an emphasis on opportunities and challenges for practical applications in electronics and photonics. It covers three materials classes on silicon: Semiconductors such as undoped and doped Si and SiGe, SiC, GaN, and III-V arsenides and phosphides; dielectrics including silicon nitride and high-k, low-k, and electro-optically active oxides; and metals, in particular silicide alloys. The impact of film growth and integration on physical, electrical, and optical properties, and ultimately device performance, is highlighted.
About the author
Vijay Narayanan (IBM Thomas J Watson Research Center, USA);Martin M Frank (IBM Thomas J Watson Research Center, USA);Alexander A Demkov (The University of Texas at Austin, USA)
Rate this ebook
Tell us what you think.
Reading information
Smartphones and tablets
Install the Google Play Books app for Android and iPad/iPhone. It syncs automatically with your account and allows you to read online or offline wherever you are.
Laptops and computers
You can listen to audiobooks purchased on Google Play using your computer's web browser.
eReaders and other devices
To read on e-ink devices like Kobo eReaders, you'll need to download a file and transfer it to your device. Follow the detailed Help Center instructions to transfer the files to supported eReaders.
