Measurement Technology for Micro-Nanometer Devices
Wendong Zhang · Xiujian Chou · Tielin Shi · Zongmin Ma · Haifei Bao · Jingdong Chen · Liguo Chen · Dachao Li · Chenyang Xue
Oct 2016 · John Wiley & Sons
Ebook
352
Pages
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About this ebook
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
About the author
WENDONG ZHANG, North University of China, China
XIUJIAN CHOU, North University of China, China
TIELIN SHI, Huazhong University of Science and Technology, China
ZONGMIN MA, North University of China, China
HAIFEI BAO, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, China
JING CHEN, Peking University, China
LIGUO CHEN, Soochow University, China
DACHAO LI, Tianjin University, China
CHENYANG XUE, Key Laboratory of Instrument Science and Dynamic Measurement, Ministry of Education, China
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