Beam Injection Assessment of Defects in Semiconductors
Martin Kittler · Otwin Breitenstein · A. Endrös · Wolfgang Schröter
Dec 1998 · Trans Tech Publications Ltd
Ebook
550
Pages
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About this ebook
The 5th International Workshop on Beam Injection Assessment of Defects in Semiconductors (BIADS 98) focussed on many theoretical and experimental aspects of this topic. The aim was to bring together specialists working in the fields of both fundamental research and applications. There were more than 80 participants from 15 countries all over the world.
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