Semiconductor Wafer Fabrication, Coatings and Tribology
Juraj Marek · Gregor Pobegen · Ulrike Grossner · Hamada Shoukry · Zhigang Fang
May 2023 · Trans Tech Publications Ltd
Ebook
156
Pages
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About this ebook
The special edition includes articles that represented the latest research results and engineering solutions in the synthesis of nanomaterials, analysis processes of semiconductor wafer fabrication, and some decisions on coatings and exploration of tribological performance of several polymer and composite materials. This special edition will be interesting to specialists in nanomaterials synthesis, semiconductor power device production and protective coatings in machinery.
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